桥式三坐标
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ZEISS SPECTRUM II
蔡司技术的入门级水平,测量范围 可达10/16/6 E0自1.9 μm起...
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ZEISS NEW CONTURA
蔡司测量范围 可达12/24/10 E0自1.5 μm起...
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ZEISS ACCURA
测量范围[dm]可达20/42/15 E0自1.2 μm起...
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ZEISS MICURA
测量范围[dm] 5/5/5 E0 = 0.7 μm...
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ZEISS PRISMO navigator
ZEISS计量型三坐标,测量范围[dm] 可达16/42/10 E0自0.5 μm起...
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ZEISS XENOS
测量范围[dm] 9/15/7 E0 = 0.3 μm...